Kinetics of Metastable Argon Atoms in an Ar-N_2 RF ICP Discharge

  • Namjun K
  • Soo-ghee O
  • Andre R
  • 11

    Readers

    Mendeley users who have this article in their library.
  • 3

    Citations

    Citations of this article.

Abstract

Production of metastable Ar atoms in a low-pressure inductively coupled plasma glow discharge was calculated using a simple kinetic scheme of the balance between production by electron excitation and loss by diffusion and electron quenching. The calculated results showed good agreement with the results measured by using resonant optical absorption spectroscopy. Adding N(2) into the argon gas discharge caused a considerable decrease in the density of metastable Ar atoms. The variation in the number of metastable atoms could be explained by using balance kinetics including the quenching loss of metastable atoms due to N(2).

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

Authors

  • Kang Namjun

  • Oh Soo-ghee

  • Ricard Andre

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free