A p-type transparent conductive oxide (TCO) was synthesised by codoping of poorly conducting chromium oxide (Cr2O3) with magnesium and nitrogen. We demonstrated that the codoping produced a TCO with good figure of merit despite using spray pyrolysis for deposition. The nitrogen enhances the specular transparency of the films in the visible range (400-700 nm), and Mg improves the conductivity while retaining the p-type character of the material. Co-doping with both elements produces a p-type oxide with a low resistivity of 3 cm and transmission up to 65 for a 150 nm thick film. A comparison with other known p-type materials is given. © 2011 American Institute of Physics.
CITATION STYLE
Arca, E., Fleischer, K., & Shvets, I. V. (2011). Magnesium, nitrogen codoped Cr2O3: A p-type transparent conducting oxide. Applied Physics Letters, 99(11). https://doi.org/10.1063/1.3638461
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