Measurement of metastable and resonance level densities in rare-gas plasmas by optical emission spectroscopy

  • Boffard J
  • Jung R
  • Lin C
 et al. 
  • 69

    Readers

    Mendeley users who have this article in their library.
  • 60

    Citations

    Citations of this article.

Abstract

Excitation and ionization of atoms out of the 4 energy levels of the excited np(5)(n + 1)s configuration of rare gases play an important role in many low temperature rare-gas plasmas. We compare two optical methods for measuring the number densities of atoms in these excited levels in an inductively coupled plasma under a variety of operating conditions (600 W, 1-25 mTorr). The first method is a standard white light absorption technique, whereas the second method exploits changes in the effective branching fractions of np(5)(n + 1) p -> np(5)(n + 1) s emissions brought about by radiation trapping of atoms in np(5)(n + 1) s levels. The branching fraction method was found to produce results that agree well with the direct white light absorption method for both argon and neon plasmas using little more than a low-resolution spectrum of the plasma glow.

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

Get full text

Authors

  • John B. Boffard

  • R. O. Jung

  • Chun C. Lin

  • A. E. Wendt

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free