Quantitative electron tomography is proposed to characterize porous materials at a nanoscale. To achieve reliable threedimensional (3D) quantitative information, the influence of missing wedge artifacts and segmentation methods is investigated. We are presenting the “Discrete Algebraic Reconstruction Algorithm” as the most adequate tomography method to measure porosity at the nanoscale. It provides accurate 3D quantitative information, regardless the presence of a missing wedge. As an example, we applied our approach to nanovoids in La2Zr2O7 thin films.
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