MEMS Tunable Mid-Infrared Plasmonic Spectrometer

  • Stark T
  • Imboden M
  • Kaya S
 et al. 
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Abstract

We present a microelectromechanical systems (MEMS) tunable metamaterial, Fabry-Pérot interferometer with a widely tunable mid-infrared response. An array of subwavelength holes in a gold film is suspended above a gold reflector, forming an interferometer cavity whose length can be modulated over a range of 1.7 to 21.67 ?m using MEMS electrostatic actuation. Reflectance spectra exhibit the convolution of extraordinary optical transmission through the holes and Fabry-Pérot resonances with free spectral ranges from 2900 to 230.7 cm?1. Measuring the free spectral range enables us to perform in situ interferometric calibration of the cavity length. We present a simple analytical model that describes the experimental and simulated results. This device shows promise as a surface-enhanced sensing substrate with a tunable spectral response.
We present a microelectromechanical systems (MEMS) tunable metamaterial, Fabry-Pérot interferometer with a widely tunable mid-infrared response. An array of subwavelength holes in a gold film is suspended above a gold reflector, forming an interferometer cavity whose length can be modulated over a range of 1.7 to 21.67 ?m using MEMS electrostatic actuation. Reflectance spectra exhibit the convolution of extraordinary optical transmission through the holes and Fabry-Pérot resonances with free spectral ranges from 2900 to 230.7 cm?1. Measuring the free spectral range enables us to perform in situ interferometric calibration of the cavity length. We present a simple analytical model that describes the experimental and simulated results. This device shows promise as a surface-enhanced sensing substrate with a tunable spectral response.

Author-supplied keywords

  • Fabry-Pérot
  • extraordinary optical transmission
  • metamaterials
  • microelectromechanical systems
  • plasmonics

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Authors

  • Matthias ImbodenEcole polytechnique federale de Lausanne Institute of Bioengineering

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  • Thomas Stark

  • Sabri Kaya

  • Alket Mertiri

  • Jackson Chang

  • Shyamsunder Erramilli

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