We present a microelectromechanical systems (MEMS) tunable metamaterial, Fabry-Pérot interferometer with a widely tunable mid-infrared response. An array of subwavelength holes in a gold film is suspended above a gold reflector, forming an interferometer cavity whose length can be modulated over a range of 1.7 to 21.67 μm using MEMS electrostatic actuation. Reflectance spectra exhibit the convolution of extraordinary optical transmission through the holes and Fabry-Pérot resonances with free spectral ranges from 2900 to 230.7 cm-1. Measuring the free spectral range enables us to perform in situ interferometric calibration of the cavity length. We present a simple analytical model that describes the experimental and simulated results. This device shows promise as a surface-enhanced sensing substrate with a tunable spectral response. (Figure Presented).
CITATION STYLE
Stark, T., Imboden, M., Kaya, S., Mertiri, A., Chang, J., Erramilli, S., & Bishop, D. (2016). MEMS Tunable Mid-Infrared Plasmonic Spectrometer. ACS Photonics, 3(1), 14–19. https://doi.org/10.1021/acsphotonics.5b00290
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