Methodology for quantitative measurements of multilayer polymer thin films with IR spectroscopic ellipsometry

  • Kang S
  • Prabhu V
  • Soles C
 et al. 
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  • 21

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  • Shuhui Kang

  • Vivek M. Prabhu

  • Christopher L. Soles

  • Eric K. Lin

  • Wen Li Wu

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