A micropump driven by continuous electrowetting actuation for low voltage and low power operations

Abstract

In this paper we first report a micropump actuated by continuous electrowetting (CEW). We have used the surface-tension-induced motion of a mercury drop in the microchannel filled with an electrolyte as actuation energy. We have fabricated the CEW actuator, silicone rubber pumping membranes and copper flap check valves, and have demonstrated actual liquid pumping up to 63μl/min at the applied voltage of 2.3Vpp. The maximum pump pressure is about 600Pa at the applied voltage of 2.3Vpp with operation frequency of 10Hz.