A micropump driven by continuous electrowetting actuation for low voltage and low power operations

  • Yun K
  • Cho I
  • Bu J
 et al. 
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Abstract

In this paper we first report a micropump actuated by continuous electrowetting (CEW). We have used the surface-tension-induced motion of a mercury drop in the microchannel filled with an electrolyte as actuation energy. We have fabricated the CEW actuator, silicone rubber pumping membranes and copper flap check valves, and have demonstrated actual liquid pumping up to 63 μl/min at the applied voltage of 2.3 Vpp. The maximum pump pressure is about 600 Pa at the applied voltage of 2.3 Vpp with operation frequency of 10 Hz

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Authors

  • Kwang Seok Yun

  • Ii Joo Cho

  • Jong Uk Bu

  • Geun Ho Kim

  • Young Sam Jeon

  • Chang Jin Kim

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