Monolithic photolithographically patterned Fluorocur™ PFPE membrane valves and pumps for in situ planetary exploration

  • Willis P
  • Greer F
  • Lee M
 et al. 
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Abstract

Photolithographically defined monolithic membrane valves utilizing Fluorocur™ perfluoropolyether (PFPE) were fabricated and characterized to be essentially unaltered after one million actuations and exposure to the environmental stresses associated with in situ exploration of Mars.

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Authors

  • Peter A. Willis

  • Frank Greer

  • Michael C. Lee

  • J. Anthony Smith

  • Victor E. White

  • Frank J. Grunthaner

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