A new fabrication technique for integrating silica optical devices and MEMS

Karen E. Grutter; Anthony M. Yeh; Susant K. Patra; Ming C. Wu

Conference Proceedings

A new fabrication technique for integrating silica optical devices and MEMS

Grutter K
Yeh A
Patra S
et al.

2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 (2010) 33-34

DOI: 10.1109/OMEMS.2010.5672199

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Abstract

We have developed a novel fabrication process which integrates silicon MEMS actuators with silica optical components. Suspended silica optical waveguides are actuated by a silicon electrostatic comb drive actuator, with a maximum displacement of 8μm at 35V bias. ©2010 IEEE.

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Grutter, K. E., Yeh, A. M., Patra, S. K., & Wu, M. C. (2010). A new fabrication technique for integrating silica optical devices and MEMS. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 (pp. 33–34). https://doi.org/10.1109/OMEMS.2010.5672199

A new fabrication technique for integrating silica optical devices and MEMS

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