New way to silicon microstructuring with electrochemical etching

  • Christophersen M
  • Merz P
  • Quenzer J
 et al. 
  • 4


    Mendeley users who have this article in their library.
  • 14


    Citations of this article.

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document


  • M. Christophersen

  • P. Merz

  • J. Quenzer

  • J. Carstensen

  • H. Föll

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free