Optical biosensor microsystems based on the integration of highly sensitive Mach-Zehnder interferometer devices

  • Seplveda B
  • Snchez Del Río J
  • Moreno M
 et al. 
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Abstract

We present highly sensitive optical biosensors able to be fully integrated in lab-on-a-chip microsystems using standard CMOS compatible processes. These optical biosensors are based on integrated Mach–Zehnder interferometers, which have been designed to have high surface sensitivity and monomode behaviour. As a biosensing application of the devices we show the real-time detection of the covalent immobilization and hybridization of DNA strands without labelling. In order to achieve a lab-on-a-chip portable microsystem, we present the integration of the sensor with a CMOS compatible microfluidic system using SU-8 photolithography patterned layers. Keywords:

Author-supplied keywords

  • Integrated Mach-Zehnder interferometer
  • Lab-on-a-chip
  • Optical biosensors
  • SU-8 microfluidics

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Authors

  • B. Seplveda

  • J. Snchez Del Río

  • M. Moreno

  • F. J. Blanco

  • K. Mayora

  • C. Domínguez

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