Optically driven micropump produced by three-dimensional two-photon microfabrication

  • Maruo S
  • Inoue H
  • 48


    Mendeley users who have this article in their library.
  • 140


    Citations of this article.


An optically driven lobed micropump was developed using three-dimensional
two-photon microfabrication. The two built-in rotors, 9 ?m in diameter,
are cooperatively driven by means of time-divided scanning of a single
laser beam. It was demonstrated that a tracer particle was moved by simultaneously
rotating the two rotors. The velocity of the tracer particle was proportional
to the rotation speed of the rotors in the range of 0.2--0.7 ?m/s. The
flow rate was estimated to be sub-pL/min level. This ultralow flow rate
will be useful for further integration and miniaturization of micro-total-analysis

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document


  • Shoji Maruo

  • Hiroyuki Inoue

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free