Optically driven micropump produced by three-dimensional two-photon microfabrication

  • Maruo S
  • Inoue H
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Abstract

An optically driven lobed micropump was developed using three-dimensional
two-photon microfabrication. The two built-in rotors, 9 ?m in diameter,
are cooperatively driven by means of time-divided scanning of a single
laser beam. It was demonstrated that a tracer particle was moved by simultaneously
rotating the two rotors. The velocity of the tracer particle was proportional
to the rotation speed of the rotors in the range of 0.2--0.7 ?m/s. The
flow rate was estimated to be sub-pL/min level. This ultralow flow rate
will be useful for further integration and miniaturization of micro-total-analysis
systems.

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Authors

  • Shoji Maruo

  • Hiroyuki Inoue

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