A comparative study about the phase stability of equiatomic CoCrFeMnNi alloy of thermodynamic calculation (Thermo-Calc) and experimental result is shown. The alloy was processed by through a high-pressure torsion (HPT) process and annealing treatment at temperatures ranging from 900 to 600 °C. Phase identification using X-ray diffraction and energy dispersive X-ray spectroscopy indicated that the Cr-rich sigma phase formed during annealing at temperatures lower than 800 °C after the HPT process, and fraction of sigma phase increased as decreasing annealing temperature as predicted by Thermo-Calc. The thermodynamic calculation based on the TCFE database was found to be suitable for predicting the possible phases in the CoCrFeMnNi alloy.
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