Porosity scaling strategies for low-k films

  • Michalak D
  • Blackwell J
  • Torres J
 et al. 
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Abstract

Author-supplied keywords

  • chemical synthesis
  • dielectric properties
  • porosity

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Authors

  • David J. Michalak

  • James M. Blackwell

  • Jessica M. Torres

  • Arkaprabha Sengupta

  • Lauren E. Kreno

  • James S. Clarke

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