Progress in silicon platforms for integrated optics

  • Novack A
  • Streshinsky M
  • Ding R
 et al. 
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Rapid progress has been made in recent years repurposing CMOS fabrication tools to build complex pho- tonic circuits. As the field of silicon photonics becomes more mature, foundry processes will be an essential piece of the ecosystem for eliminating process risk and allow- ing the community to focus on adding value through clever design. Multi-project wafer runs are a useful tool to promote further development by providing inexpen- sive, low-risk prototyping opportunities to academic and commercial researchers. Compared to dedicated silicon manufacturing runs, multi-project-wafer runs offer cost reductions of 100 × or more. Through OpSIS, we have begun to offer validated device libraries that allow design- ers to focus on building systems rather than modifying device geometries. The EDA tools that will enable rapid design of such complex systems are under intense devel- opment. Progress is also being made in developing prac- tical optical and electronic packaging solutions for the photonic chips, in ways that eliminate or sharply reduce development costs for the user community. This paper will provide a review of the recent developments in silicon photonic foundry offerings with a focus on OpSIS, a multi- project-wafer foundry service offering a silicon photon- ics platform, including a variety of passive components as well as high-speed modulators and photodetectors, through the Institute of Microelectronics in Singapore.

Author-supplied keywords

  • Integrated optics
  • Multi-project wafer shuttle
  • Photonics platform
  • Silicon photonics

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  • Ari Novack

  • Matt Streshinsky

  • Ran Ding

  • Yang Liu

  • Andy Eu Jin Lim

  • Guo Qiang Lo

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