Pull-in dynamics of electrostatically-actuated beams

  • Gupta R
  • Hung E
  • Yang Y
  • 14

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Abstract

We report the experimental measurement and simulation of the transient electrostatic pull-in characteristics structural beams fabricated with silicon of micro- surface micromachining. Pull-in dynamics are investigated under the influence of compressible squeezed-film damping (CSQFD) for large amplitude motion. A linearized one-dimensional model, using a fitted damping constant, and a two-dimensional finite- difference model, based on the compressible isothermal ReynoldÕs equation, are used to simulate the experimental data

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Authors

  • RK Gupta

  • ES Hung

  • YJ Yang

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