Quantitative analysis of overlapping XPS peaks by spectrum reconstruction: Determination of the thickness and composition of thin iron oxide films

  • Graat P
  • Somers M
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The composition and thickness of thin iron oxide iron were
evaluated from Fe 2p spectra as measured by X-ray photoelectron
spectroscopy. To this end the experimental spectra were
reconstructed from reference spectra of the constituents Fe/sup
0/, Fe/sup 2+/ and Fe/sup 3+/. The background contributions in the
spectra owing to inelastic scattering of signal electrons were
calculated from the depth distributions of these constituents and
their reference spectra. In the reconstruction procedure the film
thickness and the concentrations of Fe/sup 2+/ and Fe/sup 3+/ in
the oxide film were used as fit parameters. The values obtained
for the oxide film thickness were compared with thickness values
determined from the intensity of the corresponding O 1s spectra
and with thickness values resulting from ellipsometric analysis.
The sensitivity of the reconstruction procedure with regard to
film thickness and himcomposition was tested

Author-supplied keywords

  • Composition accuracy
  • Film thickness
  • Overlapping peaks
  • Oxidation
  • XPS spectra

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  • Peter Graat

  • Marcel A.J. Somers

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