Realizing the frequency quality factor product limit in silicon via compact phononic crystal resonators

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Abstract

High- Q (quality factor) resonators are a versatile class of components for radio frequency micro-electromechanical systems. Phononic crystals provide a promising method of producing these resonators. In this article, we present a theoretical study of the Q factor of a cavity resonator in a two-dimensional phononic crystal comprised of tungsten rods in a silicon matrix. One can optimize the Q of a phononic crystal resonator by varying the number of inclusions or the cavity harmonic number. We conclude that using higher harmonics marginally increases Q while increasing crystal length via additional inclusions causes Q to increase by orders of magnitude. Incorporating loss into the model shows that the silicon material limit on Q is achievable using a two-dimensional phononic crystal design with a reasonable length. With five layers of inclusions on either side of the cavity, the material limit on Q is achieved, regardless of the harmonic number. © 2010 American Institute of Physics.

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Goettler, D., Su, M., Leseman, Z., Soliman, Y., Olsson, R., & El-Kady, I. (2010). Realizing the frequency quality factor product limit in silicon via compact phononic crystal resonators. Journal of Applied Physics, 108(8). https://doi.org/10.1063/1.3475987

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