Abstract
An RF MEMs (microelectromechanical system) variable capacitor has been demonstrated with a 22:1 tuning range, tuning from 1.5 to 33.2 pF of capacitance. This capacitor was constructed using bistable MEMs membrane capacitors with individual tuning ranges of 70:1 to 100:1, control voltages in the 30-55 V range, switching speeds less than 10 μS, and operating frequencies as high as 40 GHz. These devices may eventually provide a viable alternative to electronic varactors with improved tuning range and lower loss.
Cite
CITATION STYLE
Goldsmith, C. L., Malczewski, A., Yao, Z. J., Chen, S., Ehmke, J., & Hinzel, D. H. (1999). RF MEMs variable capacitors for tunable filters. International Journal of RF and Microwave Computer-Aided Engineering, 9(4), 362–374. https://doi.org/10.1002/(SICI)1099-047X(199907)9:4<362::AID-MMCE7>3.0.CO;2-H
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