Sensors for sub-ppm NO2 gas detection based on carbon nanotube thin films

  • Valentini L
  • Armentano I
  • Kenny J
 et al. 
  • 54

    Readers

    Mendeley users who have this article in their library.
  • N/A

    Citations

    Citations of this article.

Abstract

Carbon nanotubes (CNTs) deposited by plasma-enhanced chemical vapor deposition on Si3N4/Si substrates have been investigated as resistive gas sensors for NO2. Upon exposure to NO2, the electrical resistance of the CNTs was found to decrease. The maximum variation of resistance to NO2 was found at an operating temperature of around 165 #x2009; #xb0;C. The sensor exhibited high sensitivity to NO2 gas at concentrations as low as 10 ppb, fast response time, and good selectivity. A thermal treatment method, based on repeated heating and cooling of the films, adjusted the resistance of the sensor film and optimized the sensor response to NO2. #xa9; 2003 American Institute of Physics.

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

Authors

  • L. Valentini

  • I. Armentano

  • J. M. Kenny

  • C. Cantalini

  • L. Lozzi

  • S. Santucci

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free