Single-shot two-dimensional surface measurement based on spectrally resolved white-light interferometry.

  • Zhu P
  • Wang K
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By analyzing the spectral domain's phase information, one can use spectrally resolved white-light interferometry (SRWLI) to obtain the profile with a single frame of an interferogram. We present here a two-dimensional (2D) SRWLI method that can be applied to measure narrow rectangle areas. A frequency comb is produced by using a Fabry-Perot (F-P) etalon to filter the broadband source. With the filtered frequency comb illumination, the interference patterns under adjacent wavelengths would be separated by a little distance, which enables us to obtain a 2D profile with a small width. The experimental details of measurement on a step sample are discussed in this paper.

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  • Pei Zhu

  • Kaiwei Wang

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