Single-shot two-dimensional surface measurement based on spectrally resolved white-light interferometry.

  • Zhu P
  • Wang K
  • 14

    Readers

    Mendeley users who have this article in their library.
  • 4

    Citations

    Citations of this article.

Abstract

By analyzing the spectral domain's phase information, one can use spectrally resolved white-light interferometry (SRWLI) to obtain the profile with a single frame of an interferogram. We present here a two-dimensional (2D) SRWLI method that can be applied to measure narrow rectangle areas. A frequency comb is produced by using a Fabry-Perot (F-P) etalon to filter the broadband source. With the filtered frequency comb illumination, the interference patterns under adjacent wavelengths would be separated by a little distance, which enables us to obtain a 2D profile with a small width. The experimental details of measurement on a step sample are discussed in this paper.

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

Authors

  • Pei Zhu

  • Kaiwei Wang

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free