Spatially resolved optical emission spectroscopy of pulse magnetron sputtering discharge

  • Kim Y
  • Jung M
  • Oh S
 et al. 
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Abstract

The spatially resolved optical emission spectroscopy of various species of a pulse DC unbalanced magnetron sputtering is studied. Ar-N2gas mixtures are used. Emission lines corresponding to titanium cathode and gas discharge species are considered. In this study, the two-dimensional (2-D) emission profiles of the lines are measured by an ICCD camera during TiN coatings. It turns out that the 2-D emission profiles of the various lines behave differently. As a result, we obtained the surface roughness value of RMS 2.3 nm at higher pulse frequency and 3.8 nm at lower pulse duty cycle. © 2004 Elsevier B.V. All rights reserved.

Author-supplied keywords

  • Pulsed plasma
  • Reactive magnetron sputtering
  • Spatially resolved OES

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Authors

  • Yong M. Kim

  • Min J. Jung

  • Soo G. Oh

  • Jeon G. Han

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