Stress analysis of transferred thin-GaN LED by Au-Si wafer bonding

  • Hsu S
  • 5


    Mendeley users who have this article in their library.
  • 2


    Citations of this article.


Nowadays, the high power GaN-based LED has attracted serious attention for the lighting application. One of key issues for high power GaN-base LED to achieve sufficient lighting efficiency over the traditional light sources, such as, white incandescent and halogen light bulb is the efficiency of heat dissipation. Typically, GaN epi-layer is grown on sapphire substrates. The poor thermal conductivity of sapphire substrate has been identified to be the main limitation for the application of high power GaN LED. To improve the heat dissipation and lighting efficiency, we report a thin GaN structure by using Au-Si wafer bonding and Laser lift-off (LLO) technique. The GaN wafer was first deposited with a Au bonding layer and bonded onto a good thermal conduction substrate, i.e., heavy-doped Si. Then, 248 nm KrF excimer Laser was used to strip the original sapphire substrate. To assure a successful GaN epi-layer transferring, Raman spectrum on the transferred GaN layer was performed and the result shows no quality change in the transferred GaN layer. In this work, we also fabricated the vertical LED devices on the transferred GaN epi-layer. Therefore, L-I-V result was obtained which will be presented in this talk. Moreover, we will discuss the effects and advantages of Au-Si bonding on the efficiency of lighting.

Author-supplied keywords

  • achieve sufficient lighting efficiency
  • application
  • as
  • attention for the lighting
  • au-si alloy
  • efficiency of heat dissipation
  • gan epi-layer is grown
  • key issues for high
  • laser lift-off
  • led has attracted serious
  • light bulb is the
  • nowadays
  • on
  • one of
  • over the traditional light
  • power gan-base led to
  • raman spectroscopy
  • sources
  • stress analysis
  • such
  • the high power gan-based
  • thin-gan
  • typically
  • wafer bonding
  • white incandescent and halogen

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

Get full text


  • S. C. Hsu

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free