Structural and electrical properties of atomic layer deposited Al-doped ZnO films

  • Lee D
  • Kim H
  • Kwon J
 et al. 
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Author-supplied keywords

  • Al-doped ZnO
  • atomic layer deposition
  • doping mechanisms
  • transparent conducting oxides

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Authors

  • Do-Joong Lee

  • Hyun-Mi Kim

  • Jang-Yeon Kwon

  • Hyoji Choi

  • Soo-Hyun Kim

  • Ki-Bum Kim

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