Abstract

Here, we present the activities within our research group over the last five years with cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interesting polymer for fabrication of cantilevers for bio/chemical sensing due to its simple processing and low Young’s modulus. We show examples of different integrated read-out methods and their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity to changes in the environmental temperature and pH of the buffer solution. Moreover, we show that the SU-8 cantilever surface can be functionalised directly with receptor molecules

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• ISSN: 1424-8220
• SGR: 41549120284
• PUI: 351469495
• SCOPUS: 2-s2.0-41549120284
• ISBN: 1424-8220
• DOI: 10.3390/s8031595

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