SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

  • Nordström M
  • Keller S
  • Lillemose M
 et al. 
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Here, we present the activities within our research group over the last five years with cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interesting polymer for fabrication of cantilevers for bio/chemical sensing due to its simple processing and low Young’s modulus. We show examples of different integrated read-out methods and their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity to changes in the environmental temperature and pH of the buffer solution. Moreover, we show that the SU-8 cantilever surface can be functionalised directly with receptor molecules

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  • Maria Nordström

  • Stephan Keller

  • Michael Lillemose

  • Alicia Johansson

  • Søren Dohn

  • Daniel Haefliger

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