SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

  • Nordström M
  • Keller S
  • Lillemose M
 et al. 
  • 120

    Readers

    Mendeley users who have this article in their library.
  • 91

    Citations

    Citations of this article.

Abstract

Here, we present the activities within our research group over the last five years with cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interesting polymer for fabrication of cantilevers for bio/chemical sensing due to its simple processing and low Young’s modulus. We show examples of different integrated read-out methods and their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity to changes in the environmental temperature and pH of the buffer solution. Moreover, we show that the SU-8 cantilever surface can be functionalised directly with receptor molecules

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

Authors

  • Maria Nordström

  • Stephan Keller

  • Michael Lillemose

  • Alicia Johansson

  • Søren Dohn

  • Daniel Haefliger

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free