SU-8 cantilevers for bio/chemical sensing; fabrication, characterisation and development of novel read-out methods

  • Nordström M
  • Keller S
  • Lillemose M
 et al. 
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Abstract

Here, we present the activities within our research group over the last five years with cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interesting polymer for fabrication of cantilevers for bio/chemical sensing due to its simple processing and low Young’s modulus. We show examples of different integrated read-out methods and their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity to changes in the environmental temperature and pH of the buffer solution. Moreover, we show that the SU-8 cantilever surface can be functionalised directly with receptor molecules

Author-supplied keywords

  • Cantilever based sensing
  • Label-free
  • SU-8

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