Here, we present the activities within our research group over the last five years with cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interesting polymer for fabrication of cantilevers for bio/chemical sensing due to its simple processing and low Young's modulus. We show examples of different integrated read-out methods and their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity to changes in the environmental temperature and pH of the buffer solution. Moreover, we show that the SU-8 cantilever surface can be functionalised directly with receptor molecules for analyte detection, thereby avoiding gold-thiol chemistry. © 2008 by MDPI.
CITATION STYLE
Nordström, M., Keller, S., Lillemose, M., Johansson, A., Dohn, S., Haefliger, D., … Boisen, A. (2008). SU-8 cantilevers for bio/chemical sensing; fabrication, characterisation and development of novel read-out methods. Sensors. MDPI AG. https://doi.org/10.3390/s8031595
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