We introduced nitrogen ions to modify the graphene surface and its property changes were investigated. A graphene layer grown on 6H-SiC(0001) was irradiated with 100 eV nitrogen ions. Surface property changes were studied using photoemission spectroscopy (PES), near edge x-ray adsorption spectroscopy (NEXAFS), and atomic force microscopy(AFM). N 1s core level spectra show that three kinds of nitrogen species, nitrogen gas, graphite-like and pyridine-like nitrogen were induced on the nitrogen ion implanted graphene surface.
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