In this study, we tried to deposit graphene films on copper substrates using hot filament chemical vapor deposition. The quality and the electronic and structural properties of deposited carbon films were investigated by Raman spectroscopy. Three samples of carbon films on copper substrates were produced and designated as A, B and C according to the preparation conditions. Experiments were conducted at temperatures of 800 and 1000 degrees C, a gas pressure of 500 torr and exposure times of 1, 5 and 30 min. The intensity of the disorder-induced D peak is observed relative to that of the G peak. The shape of the 2D peak gives us information about the number of layers. The lineshape of the 2D peak of sample C indicates few-layer graphene, whereas Raman spectra of samples A and B indicate hydrogenated few-layer graphene.
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