Ta ᎐ O phonon peaks in tantalum oxide films on Si

  • Ono H
  • Hosokawa Y
  • Shinoda K
 et al. 
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Author-supplied keywords

  • dielectrics
  • fourier transform infrared spectroscopy
  • oxides
  • tantalum

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  • H Ono

  • Y Hosokawa

  • K Shinoda

  • K Koyanagi

  • H Yamaguchi

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