Time-Resolved Quantum Cascade Laser Absorption Spectroscopy of Pulsed Plasma Assisted Chemical Vapor Deposition Processes Containing BCl$_{3}$

  • Lang N
  • Hempel F
  • Strämke S
 et al. 
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Authors

  • Norbert Lang

  • Frank Hempel

  • Siegfried Strämke

  • Jürgen Röpcke

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