Time-resolved temperature study in a high-power impulse magnetron sputtering discharge

  • Britun N
  • Palmucci M
  • Konstantinidis S
 et al. 
  • 22

    Readers

    Mendeley users who have this article in their library.
  • 10

    Citations

    Citations of this article.

Abstract

The gas heating dynamics is studied in a high-power impulse magnetron sputtering discharge operating in Ar-N2 gas mixtures. The time-resolved rotational temperature analysis based on the spectral transition between the B2Σu+-X2Σg+ energy levels in molecular nitrogen ion (N2+ First Negative Band) is undertaken for this purpose. The rotational temperature in the discharge is found to increase linearly during the plasma pulse being roughly independent on the nitrogen content in the examined range. Such a temperature increase is attributed to the bulk gas heating which is the result of collisions with the sputtered species. Two sputtered materials, Ti and W, are examined during the study. In the case of W sputtering, the gas heating is found to be more pronounced than in the Ti case, which is explained by more efficient energy exchange between the sputtered W atoms and the bulk gas atoms during the plasma on-time. The obtained temperature data are compared to the laser-induced fluorescence study of Ar metasta...

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

Authors

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free