A transport equation theory of beam spreading in the electron microscope

  • Rez P
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Abstract

It has been suggested that the spatial resolution of energy-dispersive analysis in the analytical transmission electron microscope is determined mainly by beam broadening from multiple scattering. The effects of multiple elastic scattering are investigated using the Boltzmann transport equation with the small scattering angle approximation, and various ways of characterising beam broadening are discussed. © 1983.

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