Ultra-deep LIGA process and its applications

  • Cheng Y
  • Shew B
  • Chyu M
 et al. 
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Abstract

Deep X-ray lithography developed in Germany around the 1980s is an important micromachining technology. Combined with electroplating and molding, this technology can produce micromachining parts with low cost and flexible choices of material. The ultra-deep (UD) LIGA process developed at the Synchrotron Radiation Research Center (SRRC) that provides better development of photoresist is capable of producing microstructures of millimeters in size. The ongoing micromachining projects at SRRC benefited from this UD LIGA process include: microfiber spinneret, leadframe punch, and w-band klystrino. © 2001 Elsevier Science B.V. All rights reserved.

Author-supplied keywords

  • Micromachining
  • Synchrotron radiation
  • Thick-film lithography
  • Ultra-deep LIGA process
  • Ultra-deep X-ray lithography

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