Visual modeling and design of microelectromechanical system transducers

  • Dewey A
  • Srinivasan V
  • Icoz E
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Abstract

Microelectromechanical systems (MEMS) integrate miniaturized mechanical
structures with electronics to extend the benefits of planar integrated
circuit technology to a broader class of systems, involving sensors,
actuators, filters, resonators, switches, and wave guides. The
mechanical structures, such as beams, plates, groves, and diaphragms,
implement transduction between energy domains, passive implementations
of discrete electrical devices, and conduction paths for electromagnetic
radiation {[}F. Frank, J. Staller, The merging of micromachining and
microelectronics, Third International Forum on ASIC and Transducer
Technology, Alberta, Canada, May 1990, pp. 53-60, R. Howe, Silicon
micromechanics: sensors and actuators in a chip, IEEE Spectrum, July
(1990) 29-35].
To realize the potential and growth of microelectromechanical systems
(MEMS) technology, many new design and manufacturing challenges must be
addressed. The close proximity of the integration of mechanical and
electrical domains within the small dimensions associated with very
large scale integration (VLSI) presents new energy-coupling issues. The
behavior of the overall system is not the simple concatenation of
separate mechanical and electrical behaviors, but the simultaneous
combination of the mechanical and electrical behaviors. New modeling,
analysis, and design techniques are required to address both mechanics
and electronics. In this paper, we address initial design capture and
system conceptualization of MEMS transducers based on visual modeling
and design.
Visual modeling frames the task of generating hardware description
language (analog and digital) component models in a manner similar to
the task of generating software programming language applications. A
domain is created using relevant artifacts and the artifacts are
rendered to highlight key design aspects. The artifacts may be directly
manipulated in controlled ways to alter design aspects-a process we
refer to as design-by-direct-manipulation.
To facilitate the application of visual modeling and design for
microelectromechanical transducers, artifacts, renderings, and
associated design aspects need to be largely predefined. This
requirement leads to a structured topological design strategy wherein
microelectromechanical foundry cell libraries are utilized.
Microelectromechanical system transducer design becomes a process of
exploring candidate cells (topologies), varying key aspects of the
transduction for each topology, and determining which topology best
satisfies design requirements.
Design renderings and aspects emphasize a circuit level of abstraction.
Coupled-energy MEMS characterizations are presented based on branch
constitutive relations and an overall system of simultaneous
differential and algebraic equations (DAE). The resulting design
methodology is called Visual Integrated-Microelectromechanical VHDL-AMS
Interactive Design (VIVID). (C) 2001 Published by Elsevier Science Ltd.

Author-supplied keywords

  • Design capture
  • Microelectromechanical system
  • Transducers
  • VHDL-AMS
  • Visual modeling

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Authors

  • A. Dewey

  • V. Srinivasan

  • E. Icoz

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