Wide bandwidth silicon nitride grating coupler

  • Doerr C
  • Chen L
  • Chen Y
 et al. 
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Abstract

We demonstrate a one-dimensional grating coupler in silicon nitride with a 67-nm 1-dB bandwidth, the largest reported for a grating coupler butt-coupled to standard single-mode fiber. The peak coupling efficiency is -4.2dB. It requires no partial etch and requires only 0.6-μm fabrication resolution. © 2010 IEEE.

Author-supplied keywords

  • Grating coupler
  • integrated optics
  • optical fiber
  • silicon nitride

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Authors

  • C.R. Doerr

  • L. Chen

  • Y.-K. Chen

  • L.L. Buhl

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