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Fabrication of diffractive optical elements with digital projection photochemical etching

Optics InfoBase Conference Papers (2014)
DOI: 10.1364/cleo_si.2014.sm1h.4
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Abstract

We demonstrate a new fabrication technique called digital projection photochemical etching and apply it to make complicated gray-scale diffractive optical elements, such as a radial sinusoidal grating, in a single processing step. CLEO:2014 © 2014 OSA.

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Edwards, C., Wang, K., Griffin, B. G., Zhou, R., Bhaduri, B., Popescu, G., & Goddard, L. L. (2014). Fabrication of diffractive optical elements with digital projection photochemical etching. In Optics InfoBase Conference Papers. Optical Society of America (OSA). https://doi.org/10.1364/cleo_si.2014.sm1h.4

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