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A Mathematical Introduction to Robotic Manipulation

by Frank P Incropera, David P DeWitt, Theodore L Bergman, Adrienne S Lavine, George M. Whitesides, Greg Welch, Gary Bishop, H Lomax, TH Pulliam, DW Zingg, TA Kowalewski, J H Lienhard, L D Landau, E M Lifshitz, 加田修 三木武司 戸田正弘 小坂田宏造, B Zalba, Younan Xia, George M. Whitesides, Todd M. Squires, Stephen R. Quake, Junyoung Nam, Richard M Murray, Zexiang Li, S Shankar Sastry, John P A Ioannidis, Jack P Holman, John Lloyd, Yusuf Chisti, Shiyi Chen, Gary D. Doolen, Uri Alon, Stephen SP Boyd, Lieven Vandenberghe show all authors
Reviews of Modern Physics ()

Abstract

Soft lithography represents a non-photolithographic strategy based on self- assembly and replica molding for carrying out micro- and nanofabrication. It provides a convenient, effective, and low-cost method for the formation and manufacturing of micro- and nanostructures. In soft lithography, an elastomeric stamp with patterned relief structures on its surface is used to generate patterns and structures with feature sizes ranging from 30 nm to 100 µm. Five tech- niques have been demonstrated: microcontact printing (µCP), replica molding (REM), microtransfer molding (µTM), micromolding in capillaries (MIMIC), and solvent-assisted micromolding (SAMIM). In this chapter we discuss the pro- cedures for these techniques and their applications in micro- and nanofabrication, surface chemistry, materials science, optics, MEMS, and microelectronics.

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