Two-dimensional analysis of radio frequency discharges

Abstract

A two-dimensional (2-D) model for the charged particle transport in radio frequency capacitively coupled discharges is presented. The model consists of the three moments of the Boltzmann equation with rate constants for inelastic processes from a zero-dimensional Boltzmann solver. Variation of electron density, potential, and excitation rates inside the reactor is presented and discussed for an argon discharge. © 1996 IEEE.