Technology developments of micro fluid dispensing

Abstract

Micro fluid dispensing technology is widely applied in electronics packaging, micro electromechanical system assembly, and biotechnology experiments, in which pl or nl amount of fluid materials (such as solder paste, adhesive, and DNA solution) are delivered controllably for the purpose of conducting, bonding, sealing, etc. This paper reviewed the latest developments as well as advantages and limits of three kinds of micro dispensing technology, which are needle nozzle type, integrated nozzle type and pin transfer type, classified according to the configuration of the nozzle unit. The measuring methods for the micro droplets are also briefly introduced in the article. Our work of dispensing less than 3 pl adhesive in an microassembly task is briefly introduced, and the trends and challenges of micro fluid dispensing are also discussed.