Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromcchanical system's (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from individual carbon nanotubes (CNTs) and SiGe/Si nanocoils is described. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives.
CITATION STYLE
Nelson, B. J., Dong, L. X., Subramanian, A., & Bell, D. J. (2007). Hybrid nanorobotic approaches to NEMS. Springer Tracts in Advanced Robotics, 28. https://doi.org/10.1007/978-3-540-48113-3_15
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