Material production technology for oxide semiconductor gas sensors: Recent research progress

Abstract

Oxide-semiconductor based gas sensors have been intensively investigated in order to improve the sensitivity and selectivity of a certain gas. This article reviews the recent research progress of gas sensors having oxide semiconductor as an active layer, in particular detecting for H2 and volatile organic compounds. The semiconductor material for gas sensors reported in this article includes SnO2, WO3, ZnO, In2O3, and NiO. The sensitivity of gas sensors having different structures and semiconductors is compared.