Nanosurveyor 2: A Compact Instrument for Nano-Tomography at the Advanced Light Source

Abstract

The Advanced Light Source has developed a compact tomographic microscope based on soft x-ray ptychography for the study of nanoscale materials [1,2]. The microscope utilizes the sample manipulator mechanism from a commercial TEM coupled with laser interferometric feedback for zone plate positioning and a fast frame rate charge-coupled device detector for soft x-ray diffraction measurements. The microscope has achieved point to point (25 nm steps) scan rates of greater than 120 Hz with a positioning accuracy of better than 1 nm RMS. The instrument will enable the use of commercially available sample holders compatible with FEI transmission electron microscopes thus also allowing in-situ measurement of samples using both soft x-rays and electrons. This instrument is a refinement of a currently commissioned instrument called The Nanosurveyor, which has demonstrated resolution of better than 10 nm in two dimensions using 750 eV x-rays. Once moved to the new Coherent Scattering and Microscopy beamline it will enable spectromicroscopy and tomography of nano-materials with wavelength limited spatial resolution.