Phase Transformations in PZT Thin Films Prepared by Polymeric Chemical Method

Abstract

Lead zirconate titanate Pb(Zr0.50Ti0.50)O3 (PZT) thin films were depositedby a polymeric chemical method on Pt(111)/ Ti/SiO2/Si substratesto understand the mechanisms of phase transformations in these films.PZT films pyrolyzed at temperatures higher than 350℃ present a coexistenceof pyrochlore and perovskite phases, while only perovskite phaseis present in films pyrolyzed at temperatures lower than 300℃. Forfilms where the pyrochlore and perovskite phase coexists the amountof pyrochlore phase decreases from top surface to the bottom film-electrodeinterface and the PZT structure near top surface are Ti-rich compositionswhile near the bottom film-electrode interface the compositions areZr-rich. For pyrochlore-free PZT thin film, a small (100) orientationtendency near the film-electrode interface was observed.