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Journal Article

Electrostatic MEMS: Modelling, control, and applications

Lecture Notes in Control and Information Sciences (2010) 407 113-123
DOI: 10.1007/978-3-642-16135-3_10
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Abstract

This paper addresses issues related to the modelling and the control of electrostatic microelectromechanical systems (MEMS) in applications requiring high accuracy positioning, wide operation range, and high control bandwidth.A particular emphasis is put on the choice of control system architecture and its influence on potential performance in different practical operation conditions. © 2010 Springer-Verlag Berlin Heidelberg.

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APA

Zhu, G. (2010). Electrostatic MEMS: Modelling, control, and applications. Lecture Notes in Control and Information Sciences, 407, 113–123. https://doi.org/10.1007/978-3-642-16135-3_10

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