Near diffraction limited coherent diffractive imaging with tabletop soft x-ray sources

Abstract

Tabletop coherent x-ray sources hold great promise for practical nanoscale imaging, in particular when coupled with diffractive imaging techniques. In initial work, we demonstrated lensless diffraction imaging using a tabletop high harmonic generation (HHG) source at 29 nm, achieving resolutions ∼ 200 nm. In recent work, we significantly enhanced our diffractive imaging resolution by implementing a new high numerical aperture (up to NA=0.6) scheme and field curvature correction where we achieved sub-100 nm resolution. Here we report the first demonstration of Fourier transform holography (FTH) with a tabletop SXR source, to acquire images with a resolution 90 nm. The resolution can be refined by applying phase retrieval. Additionally, we show initial results from FTH with 13.5 nm HHG radiation and demonstrate ∼ 180 nm resolution. © 2009 IOP Publishing Ltd.