RISE: Correlative confocal raman and scanning electron microscopy

Abstract

RISE, the combination of Raman Imaging and Scanning Electron microscopy is a promising technique that adds chemical information to the high resolution imaging capability of electron microscopy. By automatically transferring the sample from the electron beam to a separate Raman position inside the vacuum chamber, Raman molecular imaging can be performed without compromising SEM performance. Chemical information can be acquired with a resolution down to 300 nm and results obtained with both techniques can be overlaid with high precision.