CITATION STYLE
Maniv, S. (1993). A Proposition of a Novel Reactive Sputter-Deposition System for Synthesizing Multi-Component Materials. In Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices (pp. 135–140). Springer Netherlands. https://doi.org/10.1007/978-94-011-1727-2_9
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