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Comparative Study of Near Stochiometric a-SiC:H and a-SiC Films: Effect of the Bonded Hydrogen

  • Vasin A
  • Rusavsky A
  • Kushnirenko V
  • et al.
Springer-Verlag, (2005), 419-428
DOI: 10.1007/1-4020-3471-7_34
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Vasin, A. V., Rusavsky, A. V., Kushnirenko, V. I., Nazarov, A. N., Lysenko, V. S., Starik, S. P., … Puzikov, V. M. (2005). Comparative Study of Near Stochiometric a-SiC:H and a-SiC Films: Effect of the Bonded Hydrogen. In Innovative Superhard Materials and Sustainable Coatings for Advanced Manufacturing (pp. 419–428). Springer-Verlag. https://doi.org/10.1007/1-4020-3471-7_34

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