Nanofocusing refractive X-ray lenses: Fabrication and modeling

Abstract

Nanofocusing refractive X-ray lenses (NFLs) form the basis of a hard X-ray scanning microscope. They are characterized by their short focal length (∼ 10 mm at 15 keV to 25 keV) and large numerical aperture, allowing for the generation of hard X-ray nanobeams even at short distances from a synchrotron radiation source. These optics, made out of silicon by electron beam lithography and subsequent deep reactive ion etching, have been shown to focus hard x-rays down to 50 nm. We have modeled these optics, allowing us to characterize slight aberrations and the wave-field properties in the focus by analyzing the beam profile in the far field. © 2009 IOP Publishing Ltd.