Electron Spectroscopic Analysis of Multicomponent Thin Films with Particular Emphasis on Oxides

Barr, T. L. (1993). Electron Spectroscopic Analysis of Multicomponent Thin Films with Particular Emphasis on Oxides. In Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices (pp. 283–309). Springer Netherlands. https://doi.org/10.1007/978-94-011-1727-2_16