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The reliability of RF-MEMS: failure modes, test procedures, and instrumentation

  • De Wolf I
Reliability, Testing, and Characterization of MEMS/MOEMS III (2004) 5343 1
DOI: 10.1117/12.532335
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Abstract

This paper discusses some reliability issues that play a role for capacitive RF MEMS switches. We describe how these degradation mechanisms affect the functioning of the switches. Also the methodology that can be used to test capacitive RF MEMS switches, including some packaging aspects, and dedicated instrumentation required to perform these tests are discussed.

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APA

De Wolf, I. (2004). The reliability of RF-MEMS: failure modes, test procedures, and instrumentation. In Reliability, Testing, and Characterization of MEMS/MOEMS III (Vol. 5343, p. 1). SPIE. https://doi.org/10.1117/12.532335

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